Tool: Helios Nanolab600i Dual Beam (FIB/SEM)
Organization
Centre d’Élaboration de Matériaux et d’Études Structurales
Last checked date
01-02-2024
Description
Scanning Electron Microscope SEM (FEG) ;
Focused Ion Beam (FIB) for preparation of thin lamella for TEM;
EDS analysis;
EBSD analysis (Electron BackScattered Diffraction); TKD (Transmission Kikuchi Diffraction)
Output and data types
Image
Image/Figure
spectra
object
EDS spectra
Image/Figure
spectra
object
EDS spectra
Impact on object or sample
Micro-destructive (removal or permanent alteration of very small, inconspicuous portions)
Manufacturer
Thermofisher
Model
Helios
Acquisition areas
Millimetres
Working distances
Close-range (0.01 - 0.1 m)