IBA
micro-PIXE

The principles of in-vacuum IBA are similar to the in-air method. The main difference is the lateral resolution. Since the sample and the beam are in vacuum, a much better lateral resolution can be achieved, in the range of a few microns - 1 micron. However, the vacuum chamber limits the size of the sample and some sensitive materials might be also excluded. The most used IBA technique is particle-induced X-ray emission (PIXE) analysis. PIXE analysis is considered a surface-sensitive technique that does not require prior sample preparation (except in special cases such as removing the corrosion layer if the intact material is to be analysed). The quantitative analysis is straightforward, based on physical parameters. PIXE spectra are evaluated with the GUPIXWIN software package. PIXE can be used in parallel with particle-induced gamma-ray emission (PIGE). PIGE covers lighter elements, for example lithium, fluorine or sodium. The quantification is usually standard-based which can be refined. Layered samples can be analysed by Rutherford backscattering spectrometry. Depending on the problem, either in parallel with PIXE or separately, using a helium beam.

Particle induced x-ray emission (pixe)

PIGE, RBS

Analysis method

1.0